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GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

Name: GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process
Brand: Ningbo Baosi Energy Equipment Co., Ltd.
SKU: GRH3001
Price: 15,650.00 USD
Availability: InStock

Détails du produit:

Lieu d'origine:	Chine
Nom de marque:	Baosi
Certification:	CE
Numéro de modèle:	GRH3001

Informations détaillées

Lieu d'origine:

Chine

Nom de marque:

Baosi

Certification:

Numéro de modèle:

GRH3001

Vitesse de pompage:

³ /h de 3000 m

Pression ultime:

≤0,5 Pa

Puissance du moteur:

11+7,5 kW

Tension:

380 V/triphasé

Entrée:

ISO160

Sortie:

Le prix de vente

Bruit:

≤ 70 dB (A)

Poids:

770 kilogrammes

Dimensions:

922×516×988 millimètres

Eau de refroidissement:

0,1-0,6 MPa, 11 L/min

Purge N2:

0,2-0,6 MPa, 43/97/123 L/min

Mettre en évidence:

High Light

Mettre en évidence:

high capacity dry vacuum pump

3000m3h claw vacuum pump

industrial semiconductor vacuum pump

Informations commerciales

Quantité de commande min:

1 ensemble

Prix:

USD 12800-18500/Set

Détails d'emballage:

Emballage de caisse en bois standard d'exportation

Délai de livraison:

20-35 jours ouvrables

Conditions de paiement:

T/T, L/C

Capacité d'approvisionnement:

30 ensembles/mois

Description du produit

GRH3001 Dry Claw Vacuum Pump 3000 m³/h High-Capacity Oil-Free Vacuum Pump for Semiconductor Industrial Process

GRH3001 Dry Claw Vacuum Pump — 3000 m³/h High-Capacity Oil-Free Solution

The GRH3001 is a high-capacity dry claw vacuum pump delivering 3000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. With a powerful 11+7.5 kW dual motor configuration, it handles the most demanding semiconductor, photovoltaic, and lithium battery manufacturing processes while maintaining contamination-free operation.

Key Features

High-Capacity Oil-Free Design: 3000 m³/h pumping speed with zero oil contamination risk
Dual Motor System: 11+7.5 kW permanent magnet synchronous motors for maximum efficiency
Advanced Claw Rotor: Superior dust handling and long service life in harsh environments
Dust & Vapor Tolerant: Insensitive to particulates and water vapor in process gases
Compact Integration: 922 * 516 * 988 mm footprint with 770 kg robust construction
Comprehensive Protection: Full safety and monitoring features with adaptive control
Low Noise Operation: ≤70 dB(A) for comfortable working environments
Multi-Layer Sealing: Lip seal + labyrinth seal + nitrogen purge for guaranteed oil-free vacuum
Smart Connectivity: I/O and RS485 (Modbus protocol) remote monitoring and control

Technical Specifications

Model	GRH3001
Pumping Speed	3000 m³/h
Ultimate Pressure	≤0.5 Pa
Motor Power	11 + 7.5 kW
Voltage	380V (3-Phase)
Inlet Connection	ISO160
Outlet Connection	KF40
Noise Level	≤70 dB(A)
Weight	770 kg
Dimensions (LWH)	922 * 516 * 988 mm
Cooling Water Pressure	0.1–0.6 MPa
Cooling Water Flow	11 L/min
N₂ Purge Pressure	0.2–0.6 MPa
N₂ Purge Flow	43/97/123 L/min
Operating Temperature	5–40°C; ≤90% RH

Applications

Semiconductor: Etch, Ion Implantation, CVD (ALD, LPCVD, PECVD, MOCVD, SACVD, RTP, HDP-CVD)
Photovoltaic: Crystal growth, solar cell manufacturing processes
Lithium Battery: Cell vacuum drying, electrolyte filling, degassing processes

Balises:

GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

High Light

Mettre en évidence:

high capacity dry vacuum pump

3000m3h claw vacuum pump

industrial semiconductor vacuum pump

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