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GRH1802 Dry Claw Vacuum Pump 1800 m³/h High-Speed Oil-Free Vacuum Pump for Semiconductor Manufacturing

Name: GRH1802 Dry Claw Vacuum Pump 1800 m³/h High-Speed Oil-Free Vacuum Pump for Semiconductor Manufacturing
Brand: Ningbo Baosi Energy Equipment Co., Ltd.
SKU: GRH1802
Price: 11,500.00 USD
Availability: InStock

Détails du produit:

Lieu d'origine:	Chine
Nom de marque:	Baosi
Certification:	CE
Numéro de modèle:	GRH1802

Informations détaillées

Lieu d'origine:

Chine

Nom de marque:

Baosi

Certification:

Numéro de modèle:

GRH1802

Vitesse de pompage:

1800 m³/h

Pression ultime:

≤0,5 Pa

Puissance du moteur:

7,5+4,5 kW

Tension:

380 V/triphasé

Entrée:

ISO160

Sortie:

Le prix de vente

Bruit:

＜70 dB(A)

Poids:

472 kilogrammes

Dimensions:

935×420×795 millimètres

Eau de refroidissement:

0,3-0,6 MPa, 6 L/min

Purge N2:

0,25-0,69 MPa, 4-96 L/min

Mettre en évidence:

High Light

Mettre en évidence:

high speed dry vacuum pump

1800m3h claw vacuum pump

semiconductor process vacuum pump

Informations commerciales

Quantité de commande min:

1 ensemble

Prix:

USD 9500-13500/Set

Détails d'emballage:

Emballage de caisse en bois standard d'exportation

Délai de livraison:

15-30 jours ouvrables

Conditions de paiement:

T/T, L/C

Capacité d'approvisionnement:

50 ensembles/mois

Description du produit

GRH1802 Dry Claw Vacuum Pump — 1800 m³/h Oil-Free Industrial Solution

The GRH1802 is a high-performance dry claw vacuum pump from the GRH series, delivering 1800 m³/h pumping speed with ultimate pressure ≤0.5 Pa. Its oil-free claw mechanism makes it ideal for semiconductor, photovoltaic, and lithium battery manufacturing processes that demand contamination-free vacuum environments.

Key Features

Oil-Free Claw Mechanism: No oil or working medium in pump chamber — ensures process cleanliness
Permanent Magnet Synchronous Motor: Superior energy efficiency for lower operating costs
Advanced Rotor Design: Enhanced dust exhaust capability for harsh process conditions
Dust & Vapor Insensitive: Handles dust and water vapor in pumped gases reliably
Compact & Integrated: Space-efficient design (935 * 420 * 795 mm, 472 kg)
Full Protection: Comprehensive protection with strong adaptive control
Low Vibration & Noise: Below 70 dB(A) at ultimate pressure
Advanced Sealing System: Lip seal + labyrinth seal + nitrogen purge for oil-free vacuum
Remote Monitoring: I/O and RS485 (Modbus) interface for remote control

Technical Specifications

Model	GRH1802
Pumping Speed	1800 m³/h
Ultimate Pressure	≤0.5 Pa
Motor Power	7.5 + 4.5 kW
Voltage	380V (3-Phase)
Inlet Connection	ISO160
Outlet Connection	KF40
Noise Level	＜70 dB(A)
Weight	472 kg
Dimensions (LWH)	935 * 420 * 795 mm
Cooling Water Pressure	0.3–0.6 MPa
Cooling Water Flow	6 L/min
N₂ Purge Pressure	0.25–0.69 MPa
N₂ Purge Flow	4–96 L/min
Operating Temperature	5–40°C; ≤80% RH

Applications

Semiconductor: Etch, Ion Implantation, CVD (ALD, PECVD, MOCVD, SACVD, RTP, HDP-CVD)
Photovoltaic: Crystal growth furnaces, solar cell fabrication
Lithium Battery: Cell vacuum drying, electrolyte filling, degassing

Balises:

GRH1802 Dry Claw Vacuum Pump 1800 m³/h High-Speed Oil-Free Vacuum Pump for Semiconductor Manufacturing

High Light

Mettre en évidence:

high speed dry vacuum pump

1800m3h claw vacuum pump

semiconductor process vacuum pump

GRH1802 Dry Claw Vacuum Pump — 1800 m³/h Oil-Free Industrial Solution

Key Features

Technical Specifications

Applications

pompe à vide turbomoléculaire,

Pompes à vide élevé,

high speed dry vacuum pump

GRM1201 Pompes à vide sec à racines multifase 1200 m3/h sans huile pour semi-conducteurs PECVD MOCVD

Pompe à vide sèche refroidie par eau 1200 m³/h ≤0,5 Pa GRH1202

Pompe à vide sèche refroidie à l'eau 1200 m³/h, ≤0,15 Pa, 1,9 kW, GRM1201

Pompes à vide sec refroidies à l'eau 200m3/h,≤ 0,5Pa,1.9kw, GRM201

Pompes à vide sec refroidies à l'eau 600m3/h,≤ 0,15Pa,1.9kw, GRM601