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GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock Transfer

GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock Transfer

Détails du produit:
Lieu d'origine: Chine
Nom de marque: Baosi
Certification: CE
Numéro de modèle: GRM4201
Informations détaillées
Lieu d'origine:
Chine
Nom de marque:
Baosi
Certification:
CE
Numéro de modèle:
GRM4201
Pression ultime:
≤0,5 Pa
Vitesse de pompage:
4200 m³/h
Entrée:
ISO160
Dimensions:
1695×600×1450 mm (principal) + 295×600×1450 mm (booster)
Bruit:
≤ 75 dB (a)
Poids:
1400KG
Mettre en évidence:

High Light

Mettre en évidence:

large roots dry vacuum pump

,

4200m3h load lock vacuum

,

high capacity semiconductor pump

Informations commerciales
Quantité de commande min:
1 ensemble
Prix:
USD 22000-35000/Set
Détails d'emballage:
Emballage de caisse en bois standard d'exportation
Délai de livraison:
30-45 jours ouvrables
Conditions de paiement:
T/T, L/C
Capacité d'approvisionnement:
15 SETS/MONTH
Description du produit
GRM4201 Large Multi-Stage Roots Dry Vacuum Pump — 4200 m³/h High-Capacity Solution

The GRM4201 is a large-scale multi-stage roots dry vacuum pump specifically designed for Load-Lock chambers, transfer chambers, and fast pump-down applications. With 4200 m³/h pumping speed and 13+10 kW dual motor configuration, it meets the demands of heterojunction solar cell manufacturing and lithium battery gigafactories where rapid cycling and high vacuum integrity are critical.

Key Features
  • Ultra-High Capacity: 4200 m³/h for rapid Load-Lock pump-down cycles
  • Multi-Stage Roots + Booster: High vacuum with wide working pressure range
  • Powerful Dual Motor: 13+10 kW permanent magnet synchronous motors
  • Unique Rotor Design: Optimized for low energy consumption with high efficiency
  • Oil-Free Clean Vacuum: No oil contamination — ideal for semiconductor and solar
  • Precision Manufacturing: Advanced CNC-machined rotors with full interchangeability
  • Dual-End Bearing Support: Ultra-reliable rotor support with minimal vibration
  • Superior Start-Up Reliability: Engineered for demanding process cycling
  • Advanced Sealing: Lip seal + labyrinth oil barrier + nitrogen purge — truly oil-free
  • Water-Cooled Sealed Motor: Eliminates oil leak risk, extends service life
  • Intelligent Control: One-touch start/stop with I/O and RS485 (Modbus-RTU)
Technical Specifications
Model GRM4201
Pumping Speed 4200 m³/h
Ultimate Pressure (w/o purge) ≤0.5 Pa
Motor Power 13 + 10 kW
Voltage 380V (3-Phase)
Inlet Connection ISO160
Outlet Connection KF50
Noise Level (with silencer) ≤75 dB(A)
Weight 1400 kg (main pump)
Dimensions — Main Pump (L*W*H) 1695 * 600 * 1450 mm
Dimensions — Booster (L*W*H) 295 * 600 * 1450 mm
Cooling Water Pressure 0.1–0.7 MPa
Cooling Water Flow 8–10 L/min
N₂ Purge Pressure 0.2–0.5 MPa
N₂ Purge Flow 0–120 L/min
Operating Temperature 5–40°C; ≤80% RH
Applications
  • Semiconductor Manufacturing: Load-Lock chambers, transfer modules, process interfaces
  • Heterojunction (HJT) Solar Cell: PECVD vacuum, rapid pump-down
  • Lithium Battery Gigafactories: High-volume cell drying and vacuum processing
  • Vacuum Coating: Load-Lock for substrate transfer while maintaining chamber vacuum