The GRM4201 is a large-scale multi-stage roots dry vacuum pump specifically designed for Load-Lock chambers, transfer chambers, and fast pump-down applications. With 4200 m³/h pumping speed and 13+10 kW dual motor configuration, it meets the demands of heterojunction solar cell manufacturing and lithium battery gigafactories where rapid cycling and high vacuum integrity are critical.
| Model | GRM4201 |
| Pumping Speed | 4200 m³/h |
| Ultimate Pressure (w/o purge) | ≤0.5 Pa |
| Motor Power | 13 + 10 kW |
| Voltage | 380V (3-Phase) |
| Inlet Connection | ISO160 |
| Outlet Connection | KF50 |
| Noise Level (with silencer) | ≤75 dB(A) |
| Weight | 1400 kg (main pump) |
| Dimensions — Main Pump (L*W*H) | 1695 * 600 * 1450 mm |
| Dimensions — Booster (L*W*H) | 295 * 600 * 1450 mm |
| Cooling Water Pressure | 0.1–0.7 MPa |
| Cooling Water Flow | 8–10 L/min |
| N₂ Purge Pressure | 0.2–0.5 MPa |
| N₂ Purge Flow | 0–120 L/min |
| Operating Temperature | 5–40°C; ≤80% RH |